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Journal: NanomaterialsVolume: 8Number: 896
Article: Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate
- Authors:
- Rashid Ali1,
- Marco Renzelli2 and
- M. Imran Khan1
- et al.
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