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Open AccessArticle

Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems

Materials & Surface Engineering Research Institute, Kanto Gakuin University, 1-1-1 Fukuura, Kanazawa, Yokohama 236-8501, Japan
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Nanomaterials 2012, 2(4), 312-328; https://doi.org/10.3390/nano2040312
Received: 29 June 2012 / Revised: 20 September 2012 / Accepted: 24 September 2012 / Published: 16 October 2012
(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching. View Full-Text
Keywords: photo-patterning; direct patterning; multi-layer films; multi-touch panel; iron; copper; lanthanides photo-patterning; direct patterning; multi-layer films; multi-touch panel; iron; copper; lanthanides
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Cordonier, C.E.J.; Honma, H. Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems. Nanomaterials 2012, 2, 312-328.

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