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Journal: Nanomaterials, 2022
Volume: 12
Number: 3269

Article: Versatile Approach of Silicon Nanofabrication without Resists: Helium Ion-Bombardment Enhanced Etching
Authors: by Xiaolei Wen, Lansheng Zhang, Feng Tian, Yang Xu and Huan Hu
Link: https://www.mdpi.com/2079-4991/12/19/3269

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