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Journal: Appl. Sci., 2019
Volume: 9
Number: 3103

Article: Experiment Research on Micro-/Nano Processing Technology of Graphite as Basic MEMS Material
Authors: by Cheng Zhang, Yijin Liu, Mingge Wu and Ningbo Liao
Link: https://www.mdpi.com/2076-3417/9/15/3103

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