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Journal: Appl. Sci., 2025
Volume: 15
Number: 7487
7487
Article: DFT Study of Initial Surface Reactions in Gallium Nitride Atomic Layer Deposition Using Trimethylgallium and Ammonia
Authors: by P. Pungboon Pansila, Seckson Sukhasena, Saksit Sukprasong, Worasitti Sriboon, Wipawee Temnuch, Tongsai Jamnongkan and Tanabat Promjun
Link: https://www.mdpi.com/2076-3417/15/13/7487

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