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Journal: Applied SciencesVolume: 15Number: 7487
Article: DFT Study of Initial Surface Reactions in Gallium Nitride Atomic Layer Deposition Using Trimethylgallium and Ammonia
- Authors:
- P. Pungboon Pansila1,
- Seckson Sukhasena2 and
- Saksit Sukprasong1
- et al.
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