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Journal: Applied SciencesVolume: 12Number: 7843
Article: Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm
  • Authors:
  • Jaqueline Stauffenberg1,*,†,
  • Ingo Ortlepp1 and
  • Johannes Belkner1,†
  • et al.
Link: https://www.mdpi.com/2076-3417/12/15/7843

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