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Journal: Appl. Sci., 2022
Volume: 12
Number: 7843

Article: Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm
Authors: by Jaqueline Stauffenberg, Ingo Ortlepp, Johannes Belkner, Denis Dontsov, Enrico Langlotz, Steffen Hesse, Ivo Rangelow and Eberhard Manske
Link: https://www.mdpi.com/2076-3417/12/15/7843

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