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Open AccessArticle

Study on the Ozone Gas Sensing Properties of rf-Sputtered Al-Doped NiO Films

1
Institute of Electronic Structure & Laser, Foundation for Research and Technology (FORTH-IESL), 71100 Herakleion, Greece
2
Department of Physics, University of Crete, 70013 Heraklion, Greece
*
Authors to whom correspondence should be addressed.
Academic Editor: Stefano Loppi
Appl. Sci. 2021, 11(7), 3104; https://doi.org/10.3390/app11073104
Received: 10 March 2021 / Revised: 26 March 2021 / Accepted: 29 March 2021 / Published: 31 March 2021
(This article belongs to the Special Issue Advances in Air Quality Monitoring and Assessment)
Al-doped NiO (NiO:Al) has attracted the interest of researchers due to its excellent optical and electrical properties. In this work, NiO:Al films were deposited on glass substrates by the radio frequencies (rf) sputtering technique at room temperature and they were tested against ozone gas. The Oxygen content in (Ar-O2) plasma was varied from 2% to 4% in order to examine its effect on the gas sensing performance of the films. The thickness of the films was between 160.3 nm and 167.5 nm, while the Al content was found to be between 5.3 at% and 6.7 at%, depending on the oxygen content in plasma. It was found that NiO:Al films grown with 4% O2 in plasma were able to detect 60 ppb of ozone with a sensitivity of 3.18% at room temperature, while the detection limit was further decreased to 10 ppb, with a sensitivity of 2.54%, at 80 °C, which was the optimum operating temperature for these films. In addition, the films prepared in 4% O2 in plasma had lower response and recovery time compared to those grown with lower O2 content in plasma. Finally, the role of the operating temperature on the gas sensing properties of the NiO:Al films was investigated. View Full-Text
Keywords: p-type sensor; Al-doped NiO; rf sputtering; ozone gas sensing p-type sensor; Al-doped NiO; rf sputtering; ozone gas sensing
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MDPI and ACS Style

Paralikis, A.; Gagaoudakis, E.; Kampitakis, V.; Aperathitis, E.; Kiriakidis, G.; Binas, V. Study on the Ozone Gas Sensing Properties of rf-Sputtered Al-Doped NiO Films. Appl. Sci. 2021, 11, 3104. https://doi.org/10.3390/app11073104

AMA Style

Paralikis A, Gagaoudakis E, Kampitakis V, Aperathitis E, Kiriakidis G, Binas V. Study on the Ozone Gas Sensing Properties of rf-Sputtered Al-Doped NiO Films. Applied Sciences. 2021; 11(7):3104. https://doi.org/10.3390/app11073104

Chicago/Turabian Style

Paralikis, Athanasios; Gagaoudakis, Emmaouil; Kampitakis, Viktoras; Aperathitis, Elias; Kiriakidis, George; Binas, Vassilios. 2021. "Study on the Ozone Gas Sensing Properties of rf-Sputtered Al-Doped NiO Films" Appl. Sci. 11, no. 7: 3104. https://doi.org/10.3390/app11073104

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