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Journal: MicromachinesVolume: 16Number: 186
Article: Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al0.8Sc0.2N
  • Authors:
  • Ruixiang Yan1,
  • Yucheng Ji1 and
  • Anyuan Liu1
  • et al.
Link: https://www.mdpi.com/2072-666X/16/2/186

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