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Journal: MicromachinesVolume: 16Number: 1413
Article: High-Performance and Thermally Robust A1-Mode Lamb Wave Resonators on Bonded LiNbO3/SiC Membranes
- Authors:
- Noriyuki Watanabe1,*,
- Shoji Kakio1 and
- Yoshiki Sakaida2
- et al.
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