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Journal: MicromachinesVolume: 15Number: 110
Article: Investigation of Gallium Arsenide Deformation Anisotropy during Nanopolishing via Molecular Dynamics Simulation
  • Authors:
  • Bo Zhao1,2,
  • Xifeng Gao1,2,* and
  • Jiansheng Pan1,2
  • et al.
Link: https://www.mdpi.com/2072-666X/15/1/110

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