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Journal: Micromachines, 2017
Volume: 8
Number: 233
Article:
Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results
Authors:
by
Frederic Zamkotsian, Patrick Lanzoni, Rudy Barette, Michael Helmbrecht, Franck Marchis and Alex Teichman
Link:
https://www.mdpi.com/2072-666X/8/8/233
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