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Micromachines 2017, 8(8), 233;

Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results

Aix Marseille Univ, CNRS, LAM, Laboratoire d’Astrophysique de Marseille, 38 rue Frederic Joliot Curie, 13388 Marseille CEDEX 13, France
Iris AO, 2930 Shattuck Avenue #304, Berkeley, CA 94705, USA
Carl Sagan Center, SETI Institute, 189 Bernardo Ave, Mountain View, CA 94043, USA
Author to whom correspondence should be addressed.
Received: 24 May 2017 / Revised: 5 July 2017 / Accepted: 14 July 2017 / Published: 27 July 2017
(This article belongs to the Special Issue MEMS Mirrors)
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Micro-opto-electro-mechanical systems (MOEMS) Deformable Mirrors (DM) are key components for next generation optical instruments implementing innovative adaptive optics systems, both in existing telescopes and in the future ELTs. Characterizing these components well is critical for next generation instruments. This is done by interferometry, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. We use a compact cryo-vacuum chamber designed for reaching 10–6 mbar and 160 K in front of our custom Michelson interferometer, which is able to measure performance of the DM at actuator/segment level and at the entire mirror level, with a lateral resolution of 2 µm and a sub-nanometer z-resolution. We tested the PTT 111 DM from Iris AO: an array of single crystalline silicon hexagonal mirrors with a pitch of 606 µm, able to move in tip, tilt, and piston (stroke 5–7 µm, tilt ±5 mrad). The device could be operated successfully from ambient to 160 K. An additional, mainly focus-like, 500 nm deformation of the entire mirror is measured at 160 K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on all segments, reaching 12 nm rms. Finally, the goal of these studies is to test DMs in cryo and vacuum conditions as well as to improve their architecture for stable operation in harsh environments. View Full-Text
Keywords: MEMS mirror arrays; MOEMS; cryogenic testing; adaptive optics; wavefront correction MEMS mirror arrays; MOEMS; cryogenic testing; adaptive optics; wavefront correction

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Zamkotsian, F.; Lanzoni, P.; Barette, R.; Helmbrecht, M.; Marchis, F.; Teichman, A. Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results. Micromachines 2017, 8, 233.

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