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Micromachines 2016, 7(5), 83;

Large-Scale Integration of All-Glass Valves on a Microfluidic Device

Laboratory for Integrated Biodevice Unit, Quantitative Biology Center, RIKEN, Suita, Osaka 565-0871, Japan
Author to whom correspondence should be addressed.
Academic Editors: Manabu Tokeshi and Kiichi Sato
Received: 28 February 2016 / Revised: 22 April 2016 / Accepted: 26 April 2016 / Published: 6 May 2016
(This article belongs to the Special Issue Micro/Nano Devices for Chemical Analysis)
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In this study, we developed a method for fabricating a microfluidic device with integrated large-scale all-glass valves and constructed an actuator system to control each of the valves on the device. Such a microfluidic device has advantages that allow its use in various fields, including physical, chemical, and biochemical analyses and syntheses. However, it is inefficient and difficult to integrate the large-scale all-glass valves in a microfluidic device using conventional glass fabrication methods, especially for the through-hole fabrication step. Therefore, we have developed a fabrication method for the large-scale integration of all-glass valves in a microfluidic device that contains 110 individually controllable diaphragm valve units on a 30 mm × 70 mm glass slide. This prototype device was fabricated by first sandwiching a 0.4-mm-thick glass slide that contained 110 1.5-mm-diameter shallow chambers, each with two 50-μm-diameter through-holes, between an ultra-thin glass sheet (4 μm thick) and another 0.7-mm-thick glass slide that contained etched channels. After the fusion bonding of these three layers, the large-scale microfluidic device was obtained with integrated all-glass valves consisting of 110 individual diaphragm valve units. We demonstrated its use as a pump capable of generating a flow rate of approximately 0.06–5.33 μL/min. The maximum frequency of flow switching was approximately 12 Hz. View Full-Text
Keywords: all-glass valves; large-scale integration; microfluidic device all-glass valves; large-scale integration; microfluidic device

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Yalikun, Y.; Tanaka, Y. Large-Scale Integration of All-Glass Valves on a Microfluidic Device. Micromachines 2016, 7, 83.

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