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Open AccessArticle

An Electromagnetic MEMS Energy Harvester Array with Multiple Vibration Modes

Jiangsu Provincial Key Labratory of Advanced Robotics, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China
Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore
Author to whom correspondence should be addressed.
Academic Editor: Cheng Luo
Micromachines 2015, 6(8), 984-992;
Received: 10 May 2015 / Revised: 2 July 2015 / Accepted: 10 July 2015 / Published: 24 July 2015
This paper reports the design, micromachining and characterization of an array of electromagnetic energy harvesters (EHs) with multiple frequency peaks. The authors present the combination of three multi-modal spring-mass structures so as to realize at least nine resonant peaks within a single microelectromechanical systems (MEMS) chip. It is assembled with permanent magnet to show an electromagnetic-based energy harvesting capability. This is the first demonstration of multi-frequency MEMS EH existing with more than three resonant peaks within a limited frequency range of 189 to 662 Hz. It provides a more effective approach to harvest energy from the vibration sources of multiple frequency peaks. View Full-Text
Keywords: MEMS; energy harvester; electromagnetic; multi-frequency MEMS; energy harvester; electromagnetic; multi-frequency
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Liu, H.; Chen, T.; Sun, L.; Lee, C. An Electromagnetic MEMS Energy Harvester Array with Multiple Vibration Modes. Micromachines 2015, 6, 984-992.

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