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Open AccessArticle

An Electromagnetic MEMS Energy Harvester Array with Multiple Vibration Modes

1
Jiangsu Provincial Key Labratory of Advanced Robotics, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China
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Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore
*
Author to whom correspondence should be addressed.
Academic Editor: Cheng Luo
Micromachines 2015, 6(8), 984-992; https://doi.org/10.3390/mi6080984
Received: 10 May 2015 / Revised: 2 July 2015 / Accepted: 10 July 2015 / Published: 24 July 2015
This paper reports the design, micromachining and characterization of an array of electromagnetic energy harvesters (EHs) with multiple frequency peaks. The authors present the combination of three multi-modal spring-mass structures so as to realize at least nine resonant peaks within a single microelectromechanical systems (MEMS) chip. It is assembled with permanent magnet to show an electromagnetic-based energy harvesting capability. This is the first demonstration of multi-frequency MEMS EH existing with more than three resonant peaks within a limited frequency range of 189 to 662 Hz. It provides a more effective approach to harvest energy from the vibration sources of multiple frequency peaks. View Full-Text
Keywords: MEMS; energy harvester; electromagnetic; multi-frequency MEMS; energy harvester; electromagnetic; multi-frequency
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Liu, H.; Chen, T.; Sun, L.; Lee, C. An Electromagnetic MEMS Energy Harvester Array with Multiple Vibration Modes. Micromachines 2015, 6, 984-992.

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