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Journal: Micromachines, 2025
Volume: 16
Number: 297

Article: A Method for Fabricating Cavity-SOI and Its Verification Using Resonant Pressure Sensors
Authors: by Han Xue, Xingyu Li, Yulan Lu, Bo Xie, Deyong Chen, Junbo Wang and Jian Chen
Link: https://www.mdpi.com/2072-666X/16/3/297

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