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Journal: MicromachinesVolume: 16Number: 1382
Article: Wettability-Controlled Hydrophobic Coating of CMP Component Using PTFE and DLC for Mitigating Slurry Agglomeration and Contamination
  • Authors:
  • Eunseok Lee1,†,
  • Kyoungjun Sun2,† and
  • Yuhan So2
  • et al.
Link: https://www.mdpi.com/2072-666X/16/12/1382

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