Gao, Y.; Peng, S.; Liu, X.; Liu, Y.; Zhang, W.; Peng, C.; Xia, S.
A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology. Micromachines 2024, 15, 356.
https://doi.org/10.3390/mi15030356
AMA Style
Gao Y, Peng S, Liu X, Liu Y, Zhang W, Peng C, Xia S.
A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology. Micromachines. 2024; 15(3):356.
https://doi.org/10.3390/mi15030356
Chicago/Turabian Style
Gao, Yahao, Simin Peng, Xiangming Liu, Yufei Liu, Wei Zhang, Chunrong Peng, and Shanhong Xia.
2024. "A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology" Micromachines 15, no. 3: 356.
https://doi.org/10.3390/mi15030356
APA Style
Gao, Y., Peng, S., Liu, X., Liu, Y., Zhang, W., Peng, C., & Xia, S.
(2024). A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology. Micromachines, 15(3), 356.
https://doi.org/10.3390/mi15030356