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Journal: MicromachinesVolume: 13Number: 1000
Article: Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror
  • Authors:
  • Sinong Zha1,2,
  • Dongling Li1,2,* and
  • Quan Wen1,2
  • et al.
Link: https://www.mdpi.com/2072-666X/13/7/1000

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