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Journal: Micromachines, 2022
Volume: 13
Number: 1000

Article: Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror
Authors: by Sinong Zha, Dongling Li, Quan Wen, Ying Zhou and Haomiao Zhang
Link: https://www.mdpi.com/2072-666X/13/7/1000

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