Merbeler, F.; Wismath, S.; Haubold, M.; Bretthauer, C.; Kupnik, M.
Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates. Micromachines 2022, 13, 676.
https://doi.org/10.3390/mi13050676
AMA Style
Merbeler F, Wismath S, Haubold M, Bretthauer C, Kupnik M.
Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates. Micromachines. 2022; 13(5):676.
https://doi.org/10.3390/mi13050676
Chicago/Turabian Style
Merbeler, Fabian, Sonja Wismath, Marco Haubold, Christian Bretthauer, and Mario Kupnik.
2022. "Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates" Micromachines 13, no. 5: 676.
https://doi.org/10.3390/mi13050676
APA Style
Merbeler, F., Wismath, S., Haubold, M., Bretthauer, C., & Kupnik, M.
(2022). Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates. Micromachines, 13(5), 676.
https://doi.org/10.3390/mi13050676