Peng, X.; Ji, Y.; Chen, S.; Guo, S.; Feng, L.; Xu, Y.; Wang, S.
Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit. Micromachines 2022, 13, 2252.
https://doi.org/10.3390/mi13122252
AMA Style
Peng X, Ji Y, Chen S, Guo S, Feng L, Xu Y, Wang S.
Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit. Micromachines. 2022; 13(12):2252.
https://doi.org/10.3390/mi13122252
Chicago/Turabian Style
Peng, Xinlin, Yucheng Ji, Shuo Chen, Song Guo, Liuhaodong Feng, Yang Xu, and Shinan Wang.
2022. "Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit" Micromachines 13, no. 12: 2252.
https://doi.org/10.3390/mi13122252
APA Style
Peng, X., Ji, Y., Chen, S., Guo, S., Feng, L., Xu, Y., & Wang, S.
(2022). Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit. Micromachines, 13(12), 2252.
https://doi.org/10.3390/mi13122252