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Journal: Micromachines, 2022
Volume: 13
Number: 1556

Article: The Reflectance Characteristics of an Inverse Moth-Eye Structure in a Silicon Substrate Depending on SF6/O2 Plasma Etching Conditions
Authors: by Jong-Chang Woo and Doo-Seung Um
Link: https://www.mdpi.com/2072-666X/13/10/1556

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