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Journal: Micromachines, 2021
Volume: 12
Number: 588
Article:
Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
Authors:
by
William Chiappim, Giorgio Testoni, Felipe Miranda, Mariana Fraga, Humber Furlan, David Ardiles Saravia, Argemiro da Silva Sobrinho, Gilberto Petraconi, Homero Maciel and Rodrigo Pessoa
Link:
https://www.mdpi.com/2072-666X/12/6/588
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