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Journal: MicromachinesVolume: 12Number: 310
Article: A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators
- Authors:
- Muhammad Mubasher Saleem1,2,*,
- Shayaan Saghir1 and
- Syed Ali Raza Bukhari1
- et al.
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