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Journal: Micromachines, 2021
Volume: 12
Number: 310
Article:
A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators
Authors:
by
Muhammad Mubasher Saleem, Shayaan Saghir, Syed Ali Raza Bukhari, Amir Hamza, Rana Iqtidar Shakoor and Shafaat Ahmed Bazaz
Link:
https://www.mdpi.com/2072-666X/12/3/310
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