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Article

Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces

1
Department of Physics, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy
2
Istituto di Fotonica e Nanotecnologie, CNR, Piazza Leonardo da Vinci 32, 20133 Milano, Italy
*
Author to whom correspondence should be addressed.
Academic Editor: Martin Byung-Guk Jun
Micromachines 2021, 12(2), 180; https://doi.org/10.3390/mi12020180
Received: 12 December 2020 / Revised: 2 February 2021 / Accepted: 7 February 2021 / Published: 11 February 2021
(This article belongs to the Special Issue New Trends and Applications in Femtosecond Laser Micromachining)
Femtosecond laser micromachining (FLM) of fused silica allows for the realization of three-dimensional embedded optical elements and microchannels with micrometric feature size. The performances of these components are strongly affected by the machined surface quality and residual roughness. The polishing of 3D buried structures in glass was demonstrated using different thermal annealing processes, but precise control of the residual roughness obtained with this technique is still missing. In this work, we investigate how the FLM irradiation parameters affect surface roughness and we characterize the improvement of surface quality after thermal annealing. As a result, we achieved a strong roughness reduction, from an average value of 49 nm down to 19 nm. As a proof of concept, we studied the imaging performances of embedded mirrors before and after thermal polishing, showing the capacity to preserve a minimum feature size of the reflected image lower than μ5μm. These results allow for us to push forward the capabilities of this enabling fabrication technology, and they can be used as a starting point to improve the performances of more complex optical elements, such as hollow waveguides or micro-lenses. View Full-Text
Keywords: femtosecond laser micromachining; fused silica; roughness analysis; thermal annealing; integrated optics femtosecond laser micromachining; fused silica; roughness analysis; thermal annealing; integrated optics
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MDPI and ACS Style

Sala, F.; Paié, P.; Martínez Vázquez, R.; Osellame, R.; Bragheri, F. Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces. Micromachines 2021, 12, 180. https://doi.org/10.3390/mi12020180

AMA Style

Sala F, Paié P, Martínez Vázquez R, Osellame R, Bragheri F. Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces. Micromachines. 2021; 12(2):180. https://doi.org/10.3390/mi12020180

Chicago/Turabian Style

Sala, Federico, Petra Paié, Rebeca Martínez Vázquez, Roberto Osellame, and Francesca Bragheri. 2021. "Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces" Micromachines 12, no. 2: 180. https://doi.org/10.3390/mi12020180

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