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Journal: Micromachines, 2020
Volume: 11
Number: 742

Article: Effects of Anisotropy on Single Crystal Silicon in Polishing Non-Continuous Surface
Authors: by Guilian Wang, Zhijian Feng, Yahui Hu, Jie Liu and Qingchun Zheng
Link: https://www.mdpi.com/2072-666X/11/8/742

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