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Journal: Micromachines, 2020
Volume: 11
Number: 638

Article: Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching
Authors: by Lihao Wang, Meijie Liu, Junyuan Zhao, Jicong Zhao, Yinfang Zhu, Jinling Yang and Fuhua Yang
Link: https://www.mdpi.com/2072-666X/11/7/638

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