Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator
1
College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China
2
Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha 410073, China
*
Authors to whom correspondence should be addressed.
Micromachines 2020, 11(5), 472; https://doi.org/10.3390/mi11050472
Received: 23 March 2020
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Revised: 24 April 2020
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Accepted: 26 April 2020
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Published: 29 April 2020
Capacitive micromechanical resonators share electrodes with the same bias voltage, resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the traditional mechanical coupling, the electrostatic coupling is determined by the structural electric potential energy, and generally, it only occurs when the coupling modes operate in nonlinear regions. However, previous electrostatic coupling studies mainly focus on the stiffness softening region, with little attention on the opposite stiffness hardening condition. This paper presents a study on the electrostatic modal coupling effect in the stiffness hardening region. A novel capacitive micromechanical resonator with different modal nonlinearities is designed and fabricated. It is demonstrated that activating a cavity mode can shift the fundamental resonance of the manipulated mode by nearly 90 times its mechanical bandwidth. Moreover, the frequency shifting direction is found to be related to the manipulated mode’s nonlinearity, while the frequency hopscotch is determined by the cavity mode’s nonlinearity. The electrostatic coupling has been proven to be an efficient and tunable dynamical coupling with great potential for tuning the frequency in a wide range. The modal coupling theory displayed in this paper is suitable for most capacitive resonators and can be used to improve the resonator’s performance.
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Keywords:
nonlinear effect; mechanical nonlinearity; stiffness hardening; modal coupling; modal interaction; electrostatic coupling; MEMS resonator
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MDPI and ACS Style
Lu, K.; Li, Q.; Zhou, X.; Song, G.; Wu, K.; Zhuo, M.; Wu, X.; Xiao, D. Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator. Micromachines 2020, 11, 472. https://doi.org/10.3390/mi11050472
AMA Style
Lu K, Li Q, Zhou X, Song G, Wu K, Zhuo M, Wu X, Xiao D. Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator. Micromachines. 2020; 11(5):472. https://doi.org/10.3390/mi11050472
Chicago/Turabian StyleLu, Kuo, Qingsong Li, Xin Zhou, Guoxiong Song, Kai Wu, Ming Zhuo, Xuezhong Wu, and Dingbang Xiao. 2020. "Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator" Micromachines 11, no. 5: 472. https://doi.org/10.3390/mi11050472
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