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Journal: MicromachinesVolume: 11Number: 54
Article: Micropatterning Method for Porous Materials Using the Difference of the Glass Transition Temperature between Exposed and Unexposed Areas of a Thick-Photoresist
  • Authors:
  • Hidetaka Ueno1,
  • Kiichi Sato2 and
  • Kou Yamada1
  • et al.
Link: https://www.mdpi.com/2072-666X/11/1/54

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