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Journal: Materials, 2023
Volume: 16
Number: 2129
Article:
Acoustic Performance of Stress Gradient-Induced Deflection of Triangular Unimorphic/Bimorphic Cantilevers for MEMS Applications
Authors:
by
Ning-Hsiu Yuan, Chih-Chia Chen, Yiin-Kuen Fuh and Tomi T. Li
Link:
https://www.mdpi.com/1996-1944/16/5/2129
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