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Journal: Materials, 2023
Volume: 16
Number: 1148
1148
Article: Dispersion and Polishing Mechanism of a Novel CeO₂-LaOF-Based Chemical Mechanical Polishing Slurry for Quartz Glass
Authors: by Zifeng Zhao, Zhenyu Zhang, Chunjing Shi, Junyuan Feng, Xuye Zhuang, Li Li, Fanning Meng, Haodong Li, Zihang Xue and Dongdong Liu
Link: https://www.mdpi.com/1996-1944/16/3/1148

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