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Journal: Materials, 2021
Volume: 14
Number: 683
Article:
Influence of Gas Annealing on Sensitivity of AlN/4H-SiC-Based Temperature Sensors
Authors:
by
Seung-Woo Jung, Myeong-Cheol Shin, Michael A. Schweitz, Jong-Min Oh and Sang-Mo Koo
Link:
https://www.mdpi.com/1996-1944/14/3/683
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