Influence of Gas Annealing on Sensitivity of AlN/4H-SiC-Based Temperature Sensors
Abstract
1. Introduction
2. Materials and Methods
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Jung, S.-W.; Shin, M.-C.; Schweitz, M.A.; Oh, J.-M.; Koo, S.-M. Influence of Gas Annealing on Sensitivity of AlN/4H-SiC-Based Temperature Sensors. Materials 2021, 14, 683. https://doi.org/10.3390/ma14030683
Jung S-W, Shin M-C, Schweitz MA, Oh J-M, Koo S-M. Influence of Gas Annealing on Sensitivity of AlN/4H-SiC-Based Temperature Sensors. Materials. 2021; 14(3):683. https://doi.org/10.3390/ma14030683
Chicago/Turabian StyleJung, Seung-Woo, Myeong-Cheol Shin, Michael A. Schweitz, Jong-Min Oh, and Sang-Mo Koo. 2021. "Influence of Gas Annealing on Sensitivity of AlN/4H-SiC-Based Temperature Sensors" Materials 14, no. 3: 683. https://doi.org/10.3390/ma14030683
APA StyleJung, S.-W., Shin, M.-C., Schweitz, M. A., Oh, J.-M., & Koo, S.-M. (2021). Influence of Gas Annealing on Sensitivity of AlN/4H-SiC-Based Temperature Sensors. Materials, 14(3), 683. https://doi.org/10.3390/ma14030683