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Journal: EnergiesVolume: 17Number: 4969
Article: Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) Analysis
- Authors:
- Hye-In Jung,
- Chang-Hyo Son and
- Joon-Hyuk Lee*
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