- Article
ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
- Shih Min Chou,
- Lay Gaik Teoh,
- Wei Hao Lai,
- Yen Hsun Su and
- Min Hsiung Hon
The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrateusing Pt as interdigitated electrodes. The structure was characterized by XRD and SEManalyses, and the ethanol vapor gas sensing as well as electrical properties have beeni...

