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Journal: SensorsVolume: 21Number: 874
Article: EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging
  • Authors:
  • Ombeline de La Rochefoucauld1,*,
  • Guillaume Dovillaire1 and
  • Fabrice Harms1
  • et al.
Link: https://www.mdpi.com/1424-8220/21/3/874

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