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Journal: Sensors, 2021
Volume: 21
Number: 874
874
Article: EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging
Authors: by Ombeline de La Rochefoucauld, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Lei Huang, Xavier Levecq, Martin Piponnier and Philippe Zeitoun
Link: https://www.mdpi.com/1424-8220/21/3/874

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