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de La Rochefoucauld O, Dovillaire G, Harms F, Idir M, Huang L, Levecq X, Piponnier M, Zeitoun P. EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors. 2021; 21(3):874. https://doi.org/10.3390/s21030874

de La Rochefoucauld, Ombeline, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Lei Huang, Xavier Levecq, Martin Piponnier, and Philippe Zeitoun. 2021. "EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging" Sensors 21, no. 3: 874. https://doi.org/10.3390/s21030874

de La Rochefoucauld, O., Dovillaire, G., Harms, F., Idir, M., Huang, L., Levecq, X., Piponnier, M., & Zeitoun, P. (2021). EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors, 21(3), 874. https://doi.org/10.3390/s21030874