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Article

EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging

1
Imagine Optic, 18 rue Charles de Gaulle, 91400 Orsay, France
2
Brookhaven National Laboratory, 50 Rutherford Drive, Upton, NY 11973, USA
3
Laboratoire d’Optique Appliquée, CNRS, ENSTA Paris, Ecole Polytechnique IP Paris, 91120 Palaiseau, France
*
Author to whom correspondence should be addressed.
Sensors 2021, 21(3), 874; https://doi.org/10.3390/s21030874
Received: 22 December 2020 / Revised: 15 January 2021 / Accepted: 20 January 2021 / Published: 28 January 2021
(This article belongs to the Special Issue EUV and X-ray Wavefront Sensing)
For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-based EUV lasers to High Harmonic Generation. In this paper, we first describe the principle of a Hartmann sensor and give some key parameters to design a high-performance sensor. We also present different applications from metrology (for manual or automatic alignment of optics), to soft X-ray source optimization and X-ray imaging. View Full-Text
Keywords: EUV wavefront sensor; X-ray wavefront sensor; Hartmann sensor; phase imaging; metrology; X-ray sources EUV wavefront sensor; X-ray wavefront sensor; Hartmann sensor; phase imaging; metrology; X-ray sources
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MDPI and ACS Style

de La Rochefoucauld, O.; Dovillaire, G.; Harms, F.; Idir, M.; Huang, L.; Levecq, X.; Piponnier, M.; Zeitoun, P. EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors 2021, 21, 874. https://doi.org/10.3390/s21030874

AMA Style

de La Rochefoucauld O, Dovillaire G, Harms F, Idir M, Huang L, Levecq X, Piponnier M, Zeitoun P. EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors. 2021; 21(3):874. https://doi.org/10.3390/s21030874

Chicago/Turabian Style

de La Rochefoucauld, Ombeline, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Lei Huang, Xavier Levecq, Martin Piponnier, and Philippe Zeitoun. 2021. "EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging" Sensors 21, no. 3: 874. https://doi.org/10.3390/s21030874

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