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Journal: Sensors, 2021
Volume: 21
Number: 3805
Article:
Analytic Design of Segmented Phase Grating for Optical Sensing in High-Precision Alignment System
Authors:
by
Guanghua Yang, Jing Li, Yu Wang, Minxia Ding and Lina Zhong
Link:
https://www.mdpi.com/1424-8220/21/11/3805
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