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Journal: Sensors, 2021
Volume: 21
Number: 3805

Article: Analytic Design of Segmented Phase Grating for Optical Sensing in High-Precision Alignment System
Authors: by Guanghua Yang, Jing Li, Yu Wang, Minxia Ding and Lina Zhong
Link: https://www.mdpi.com/1424-8220/21/11/3805

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