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Journal: Sensors, 2021
Volume: 21
Number: 3795
Article:
Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning
Authors:
by
Michael Haub, Martin Bogner, Thomas Guenther, André Zimmermann and Hermann Sandmaier
Link:
https://www.mdpi.com/1424-8220/21/11/3795
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