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Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

by 1,†, 1,†, 1,2, 1, 2 and 1,3,*
1
Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Korea
2
Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
3
Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Korea
*
Author to whom correspondence should be addressed.
Equally contributed first authorship.
Sensors 2020, 20(15), 4108; https://doi.org/10.3390/s20154108
Received: 22 June 2020 / Revised: 18 July 2020 / Accepted: 19 July 2020 / Published: 23 July 2020
(This article belongs to the Special Issue Advances in Metamaterials or Plasmonics-Based Sensors)
Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces: firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods. View Full-Text
Keywords: nanofabrication; metasurfaces; scalable; high-throughput; large-scale; metadevices; lithography; nanopatterning; top-down fabrication nanofabrication; metasurfaces; scalable; high-throughput; large-scale; metadevices; lithography; nanopatterning; top-down fabrication
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MDPI and ACS Style

Lee, T.; Lee, C.; Oh, D.K.; Badloe, T.; Ok, J.G.; Rho, J. Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces. Sensors 2020, 20, 4108. https://doi.org/10.3390/s20154108

AMA Style

Lee T, Lee C, Oh DK, Badloe T, Ok JG, Rho J. Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces. Sensors. 2020; 20(15):4108. https://doi.org/10.3390/s20154108

Chicago/Turabian Style

Lee, Taejun; Lee, Chihun; Oh, Dong K.; Badloe, Trevon; Ok, Jong G.; Rho, Junsuk. 2020. "Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces" Sensors 20, no. 15: 4108. https://doi.org/10.3390/s20154108

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