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Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes

Department of Electrical Engineering, École de Technologie Supérieure, Montreal, QC H3C 1K3, Canada
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Author to whom correspondence should be addressed.
Sensors 2019, 19(3), 680; https://doi.org/10.3390/s19030680
Received: 26 December 2018 / Revised: 31 January 2019 / Accepted: 5 February 2019 / Published: 7 February 2019
(This article belongs to the Special Issue MEMS Sensors and Resonators)
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Abstract

A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture. View Full-Text
Keywords: carbon nanotubes; suspended beam; non-suspended beam; humidity sensing; functionalized carbon nanotubes; suspended beam; non-suspended beam; humidity sensing; functionalized
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Arunachalam, S.; Izquierdo, R.; Nabki, F. Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes. Sensors 2019, 19, 680.

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