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Open AccessArticle

Design and Simulation of an Integrated Wireless Capacitive Sensors Array for Measuring Ventricular Pressure

1
CD-MEMS INAOE, Puebla 72840, Mexico
2
MEMS Department, Center for Engineering and Industrial Development, CIDESI, Queretaro 76125, Mexico
3
Department of I. T., Electronics and Control, Advanced Technology Center, CIATEQ A.C., San Luis Potosí 78395, Mexico
*
Author to whom correspondence should be addressed.
Sensors 2018, 18(9), 2781; https://doi.org/10.3390/s18092781
Received: 1 June 2018 / Revised: 17 July 2018 / Accepted: 18 July 2018 / Published: 24 August 2018
(This article belongs to the Special Issue MEMS Resonators)
This paper reports the novel design of a touch mode capacitive pressure sensor (TMCPS) system with a wireless approach for a full-range continuous monitoring of ventricular pressure. The system consists of two modules: an implantable set and an external reading device. The implantable set, restricted to a 2 × 2 cm2 area, consists of a TMCPS array connected with a dual-layer coil, for making a reliable resonant circuit for communication with the external device. The capacitive array is modelled considering the small deflection regime for achieving a dynamic and full 5–300 mmHg pressure range. In this design, the two inductive-coupled modules are calculated considering proper electromagnetic alignment, based on two planar coils and considering the following: 13.56 MHz frequency to avoid tissue damage and three types of biological tissue as core (skin, fat and muscle). The system was validated with the Comsol Multiphysics and CoventorWare softwares; showing a 90% power transmission efficiency at a 3.5 cm distance between coils. The implantable module includes aluminum- and polyimide-based devices, which allows ergonomic, robust, reproducible, and technologically feasible integrated sensors. In addition, the module shows a simplified and low cost design approach based on PolyMEMS INAOE® technology, featured by low-temperature processing. View Full-Text
Keywords: RF MEMS; pressure sensor; MEMS resonators; implantable BioMEMS; flexible electronics; touch mode capacitive sensor RF MEMS; pressure sensor; MEMS resonators; implantable BioMEMS; flexible electronics; touch mode capacitive sensor
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Hernández-Sebastián, N.; Díaz-Alonso, D.; Renero-Carrillo, F.J.; Villa-Villaseñor, N.; Calleja-Arriaga, W. Design and Simulation of an Integrated Wireless Capacitive Sensors Array for Measuring Ventricular Pressure. Sensors 2018, 18, 2781.

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