A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection

Shi, Xiaoqing; Lu, Yulan; Xie, Bo; Li, Yadong; Wang, Junbo; Chen, Deyong; Chen, Jian

doi:10.3390/s18082494

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Sensors 2018, 18(8), 2494; https://doi.org/10.3390/s18082494

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