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A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection

1,2, 1,2, 1, 1,2, 1,2,*, 1,2,* and 1,2
1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
*
Authors to whom correspondence should be addressed.
Sensors 2018, 18(8), 2494; https://doi.org/10.3390/s18082494
Received: 19 June 2018 / Revised: 31 July 2018 / Accepted: 31 July 2018 / Published: 1 August 2018
(This article belongs to the Special Issue Sensors for MEMS and Microsystems)
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PDF [857 KB, uploaded 1 August 2018]
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Abstract

This paper presents a resonant pressure microsensor relying on electrostatic excitation and piezoresistive detection where two double-ended tuning forks were used as resonators, enabling differential outputs. Pressure under measurement caused the deformation of the pressure sensitive membrane, leading to stress buildup of the resonator under electrostatic excitation with a corresponding shift of the resonant frequency detected piezoresistively. The proposed microsensor was fabricated by simplified SOI-MEMS technologies and characterized by both open-loop and closed-loop circuits, producing a quality factor higher than 10,000, a sensitivity of 79.44 Hz/kPa and an accuracy rate of over 0.01% F.S. In comparison to the previously reported resonant piezoresistive sensors, the proposed device used single-crystal silicon as piezoresistors, which was featured with low DC biased voltages, simple sensing structures and fabrication steps. In addition, the two double-ended tuning forks were used as resonators, producing high quality factors and differential outputs, which further improved the sensor performances. View Full-Text
Keywords: resonant pressure microsensor; electrostatic excitation/piezoresistive detection; double-ended tuning forks; MEMS resonant pressure microsensor; electrostatic excitation/piezoresistive detection; double-ended tuning forks; MEMS
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Shi, X.; Lu, Y.; Xie, B.; Li, Y.; Wang, J.; Chen, D.; Chen, J. A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection. Sensors 2018, 18, 2494.

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