Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry–Perot Ultrasonic Sensor for Partial Discharge Detection
Abstract
:1. Introduction
2. Working Principle
3. Sensor Design and Fabrication
4. Experimental Investigation and Results
5. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Sensor Fabrication | Ref. [10] | Ref. [12] | Ref. [21] | Ref. [9] | Present Work | |
---|---|---|---|---|---|---|
EFPI diaphragm | material | PPS * | graphene | silica | PTFE * | silicon |
thickness | 1.2 μm | 0.1 μm | 75 μm | 30 µm | 5 μm | |
diameter | 4.9 mm | 0.125 mm | 1.8 mm | 2 mm | 1.12 mm | |
resonant frequency | 40 kHz | 10 kHz | 252 kHz | 300 kHz | 60 kHz | |
sensitivity | / | 1100 nm/kPa | 3.9 nm/kPa | / | 733 nm/kPa | |
fabrication process | FP cavity length control | nanometer displacement table | translation stage | translation stage | micrometer | self-adjusted by the stepped hole |
assembling | ferrule, capillary, and fiber fixed by epoxy | ferrule and fiber held by curable gel, grapheme diaphragm transferred from the sample | silica diaphragm, ferrule, and sleeve with fiber bonded by thermal laser welding | PTFE diaphragm, tubes, and fiber bonded by glue | sensor chip, tube, and fiber fixed by glue | |
productivity | low | low | low | low | high |
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Si, W.; Fu, C.; Li, D.; Li, H.; Yuan, P.; Yu, Y. Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry–Perot Ultrasonic Sensor for Partial Discharge Detection. Sensors 2018, 18, 1975. https://doi.org/10.3390/s18061975
Si W, Fu C, Li D, Li H, Yuan P, Yu Y. Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry–Perot Ultrasonic Sensor for Partial Discharge Detection. Sensors. 2018; 18(6):1975. https://doi.org/10.3390/s18061975
Chicago/Turabian StyleSi, Wenrong, Chenzhao Fu, Delin Li, Haoyong Li, Peng Yuan, and Yiting Yu. 2018. "Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry–Perot Ultrasonic Sensor for Partial Discharge Detection" Sensors 18, no. 6: 1975. https://doi.org/10.3390/s18061975
APA StyleSi, W., Fu, C., Li, D., Li, H., Yuan, P., & Yu, Y. (2018). Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry–Perot Ultrasonic Sensor for Partial Discharge Detection. Sensors, 18(6), 1975. https://doi.org/10.3390/s18061975