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UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film

Shenzhen Key Laboratory of Sensor Technology, College of Physics and Energy, Shenzhen University, Shenzhen 518060, China
Authors to whom correspondence should be addressed.
Sensors 2018, 18(1), 50;
Received: 17 November 2017 / Revised: 18 December 2017 / Accepted: 21 December 2017 / Published: 26 December 2017
(This article belongs to the Special Issue Gas Sensors based on Semiconducting Metal Oxides)
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ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C2H5OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C2H5OH characteristics in terms of high sensitivity, excellent selectivity, rapid response/recovery, and low detection limit down to 0.1 ppm. The excellent sensing performance of the sensor with UV activation could be attributed to the photocatalytic oxidation of ethanol on the surface of the ZnO film, the planar film structure with high utilizing efficiency of UV light, high electron mobility, and a good surface/volume ratio of of ZnO film with a relatively rough and porous surface. View Full-Text
Keywords: ZnO film; UV illumination; magnetron sputtering; ethanol sensing properties ZnO film; UV illumination; magnetron sputtering; ethanol sensing properties

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Huang, J.; Du, Y.; Wang, Q.; Zhang, H.; Geng, Y.; Li, X.; Tian, X. UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film. Sensors 2018, 18, 50.

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