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Sensors 2017, 17(6), 1417;

Surface Acoustic Wave Sensors for Hydrogen and Deuterium Detection

National Institute for Laser, Plasma and Radiation Physics, Magurele 077125, Romania
Author to whom correspondence should be addressed.
Academic Editors: Jikui Luo, Weipeng Xua and Richard Yong Qing Fu
Received: 10 May 2017 / Revised: 12 June 2017 / Accepted: 15 June 2017 / Published: 16 June 2017
(This article belongs to the Special Issue Acoustic Wave Resonator-Based Sensors)
Full-Text   |   PDF [1982 KB, uploaded 17 June 2017]   |  


A delay-line-type surface acoustic wave (SAW) sensor based on a zinc oxide (ZnO) sensitive layer was developed. Two types of sensitive layers were obtained: ZnO nanowires and ZnO thin films, both deposited using laser methods (VLS-PLD and PLD, respectively) onto quartz substrates. The responses of sensors with two different nanowire lengths (300 and 600 nm) were compared with those of sensors with thin films of different thicknesses (ca. 100 and 200 nm) to different concentrations of hydrogen and deuterium. The experimental results revealed a high response at low concentrations and a rapid saturated response for nanowires, but a low response at low concentrations and a linear response to much higher gas concentrations for the thin-film-based SAW sensors. View Full-Text
Keywords: hydrogen; nanowires; PLD-VLS; surface acoustic wave (SAW) sensors; gas sensor; surface acoustic wave hydrogen; nanowires; PLD-VLS; surface acoustic wave (SAW) sensors; gas sensor; surface acoustic wave

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Marcu, A.; Viespe, C. Surface Acoustic Wave Sensors for Hydrogen and Deuterium Detection. Sensors 2017, 17, 1417.

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