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Sensors 2017, 17(4), 838;

Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
University of Chinese Academy of Sciences, Beijing 100049, China
Authors to whom correspondence should be addressed.
Received: 12 March 2017 / Revised: 31 March 2017 / Accepted: 4 April 2017 / Published: 11 April 2017
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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To improve the phase-shifting accuracy, this paper presents a novel integrated framework for design, control and experimental validation of the piezoelectric actuated phase shifter with a trade-off between accuracy and cost. The piezoelectric actuators with built-in sensors are adopted to drive the double parallel four-bar linkage flexure hinge-based mechanisms. Three mechanisms form the tripod structure of the assembled phase shifter. Then, a semi-closed loop controller with inner feedback and outer feedforward loops via the external laser interferometer is developed for accurate positioning of the phase shifter. Finally, experiments related with travel range, step response, linearity and repeatability are carried out. The linearity error is 0.21% and the repeatability error of 10 μ m displacement is 3 nm. The results clearly demonstrate the good performance of the developed phase shifter and the feasibility of the proposed integrated framework. View Full-Text
Keywords: piezoelectric actuators; flexure; semi-closed loop; laser interferometer piezoelectric actuators; flexure; semi-closed loop; laser interferometer

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Li, P.-Z.; Wang, X.-D.; Sui, Y.-X.; Zhang, D.-F.; Wang, D.-F.; Dong, L.-J.; Ni, M.-Y. Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation. Sensors 2017, 17, 838.

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