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Journal: SensorsVolume: 17Number: 257
Article: Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor
  • Authors:
  • Tao Chen,
  • Yaqiong Wang and
  • Huicong Liu*
  • et al.
Link: https://www.mdpi.com/1424-8220/17/2/257

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