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Sensors 2017, 17(2), 257;

Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China
Authors to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 25 November 2016 / Revised: 24 January 2017 / Accepted: 24 January 2017 / Published: 28 January 2017
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system. View Full-Text
Keywords: nano-positioning stage; multi-objective topological optimization; comb sensor nano-positioning stage; multi-objective topological optimization; comb sensor

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Chen, T.; Wang, Y.; Liu, H.; Yang, Z.; Wang, P.; Sun, L. Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor. Sensors 2017, 17, 257.

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