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Sensors 2016, 16(3), 314;

Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor

School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
Process Technology Department, Shanghai IC R&D Center, Shanghai 201210, China
PIE Department III, Shanghai Huahong Grace Semiconductor Manufacturing Corporation, Shanghai 201206, China
Author to whom correspondence should be addressed.
This paper is an extension of conference paper “Humidity Sensor with Graphene Oxide as Sensing Material”.
Academic Editor: Vittorio M.N. Passaro
Received: 16 December 2015 / Revised: 6 February 2016 / Accepted: 13 February 2016 / Published: 1 March 2016
(This article belongs to the Section Physical Sensors)
PDF [5112 KB, uploaded 1 March 2016]


In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows that GO sensing material has a strong and sharp (002) peak at about 10.278°, whereas graphite has (002) peak at about 26°. Device level CV and IV curves were measured in mini-environments at different relative humidity (RH) level, and saturated salt solutions were used to build these mini-environments. To evaluate the potential value of GO material in humidity sensor applications, a prototype humidity sensor was designed and fabricated by integrating the sensor with a dedicated readout ASIC and display/calibration module. Measurements in different mini-environments show that the GO-based humidity sensor has higher sensitivity, faster recovery time and good linearity performance. Compared with a standard humidity sensor, the measured RH data of our prototype humidity sensor can match well that of the standard product. View Full-Text
Keywords: relative humidity; humidity sensor; graphene oxide; capacitive sensing relative humidity; humidity sensor; graphene oxide; capacitive sensing

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Feng, J.; Kang, X.; Zuo, Q.; Yuan, C.; Wang, W.; Zhao, Y.; Zhu, L.; Lu, H.; Chen, J. Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor. Sensors 2016, 16, 314.

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